Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology

Influence of Microstructure, Mechanical Properties of TiAlN Coatings Deposited by High Power Pulsed Magnetron Sputtering at Different Pulsed Bias Voltages

Paper ID- JVST-31-08-2024-1636

Substrate bias voltage in the coating deposition process is conducive to increase the ion bombardment energy to achieve the role of improving the structure and mechanical properties of the coating. Based on this characteristic in this paper TiAlN coatings were deposited by using high-power pulsed magnetron sputtering (HiPIMS) at different pulsed bias voltages. The phase structure and cross-sectional morphology of the coatings were analyzed by X-ray diffractometer and scanning electron microscope, and the residual stresses, hardness, wear resistance and adhesion strength between coating and substrate were evaluated by the sin2ψ method, nano-hardness tester, ball-on-disc and scratching method respectively. The results indicate that a shift in the preferential orientation of the coating occurs once the coating is subjected to bias voltages, accompanied by an increase in the compressive residual stress beyond 3 GPa. The hardness tends to growth with increasing bias voltage in the effect of grain size and residual stresses. In parallel, the bias voltage has a significant effect on improving the wear resistance of the coatings, as determined by the average coefficient of friction and wear rate. However, the high residual stresses may deteriorate the adhesive properties of the coating and induce brittle chipping at high speeds and under heavy loads.

Range of intestinal microflora in patients with allergic rhinitis, atopic bronchial asthma and urticaria

Paper ID- JVST-11-05-2023-1633

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The epidemic and prevention of plagues in modern Shanghai

Paper ID- JVST-10-05-2023-1632

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Influence of Negative Bias and Magnetic Field on Structure of Microarc Oxidation Coating

Paper ID- JVST-10-05-2023-1631

Humid air is a very important service environment, in which metal friction parts should be enhanced to offer excellent corrosion resistance and wear resistance. The B4C coating is an excellent candidate material to enhance the corrosion resistance and tribological behaviors. The purpose is to investigate the effect of negative bias voltages on the tribological properties of B4C coatings under a high relative humidity environment. Amorphous B4C coatings were successfully prepared by closed field unbalanced magnetron sputtering technology and its microstructure, hardness, elastic modulus, adhesive force and tribological properties were systematically studied. Results demonstrate that the B4C coatings deposited at each negative bias voltage have a columnar structure and the surface roughness remained unchanged (about 1.0 nm), while the thickness, hardness, elastic modulus and adhesion force increase first and then decrease with the negative bias voltage increasing. Among them, the B4C (−50 V) coating showed the best mechanical properties. It should be noted that the B4C (−50 V) coating with an excellent corrosion resistance also exhibits the lowest friction coefficient (~0.15) and wear resistance (7.2 × 10−7 mm3·N−1·m−1) under humid air (85% RH). This is mainly due to the tribochemical reaction of B4C during a sliding process to produce boric acid at the sliding interface. B4C coatings can provide an excellent corrosion resistance and high wear resistance due to their high chemical stability and high hardness.

Experimental and Numerical Study on Relative Sensitivity of Hot Cathode Ionization Vacuum Gauge

Paper ID- JVST-07-05-2023-1630

In this study, a cylindrical triode ultrahigh vacuum ionization gauge with a screen-printed carbon nanotube (CNT) electron source was developed, and its metrological performance in different gases was systematically investigated using an ultrahigh vacuum system. The resulting ionization gauge with a CNT cathode responded linearly to nitrogen, argon, and air pressures in the range from ~4.0 ± 1.0 × 10−7 to 6 × 10−4 Pa, which is the first reported CNT emitter-based ionization gauge whose lower limit of pressure measurement is lower than its hot cathode counterpart. In addition, the sensitivities of this novel gauge were ~0.05 Pa−1 for nitrogen, ~0.06 Pa−1 for argon, and ~0.04 Pa−1 for air, respectively. The trend of sensitivity with anode voltage, obtained by the experimental method, was roughly consistent with that gained through theoretical simulation. The advantages of the present sensor (including low power consumption for electron emissions, invisible to infrared light radiation and thermal radiation, high stability, etc.) mean that it has potential applications in space exploration

Submission Deadline

Volume 45 , Issue 01 | 25 Nov 2025

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Publish On

Volume 45 , Issue 01 | 30 Nov 2025

Scopus Indexed(2026)

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology